Consent of Independent Registered Public Accounting Firm

 

We consent to the reference to our firm under the caption "Experts" in the Registration Statement (Form S-3) and related Prospectus of Onto Innovation, Inc. for the registration of 641,771 shares of its common stock and to the incorporation by reference therein of our reports dated February 25, 2025, with respect to the consolidated financial statements of Onto Innovation, Inc., and the effectiveness of internal control over financial reporting of Onto Innovation, Inc. included in its Annual Report (Form 10-K) for the year ended December 28, 2024, filed with the Securities and Exchange Commission.

 

/s/ Ernst & Young LLP
Iselin, New Jersey
November 21, 2025