SCHEDULE 13G/A 0001591546 XXXXXXXX LIVE 6 Common Stock 12/31/2024 0000720500 AMTECH SYSTEMS INC 032332504 58 S RIVER DRIVE SUITE 370 TEMPE AZ 85288 Rule 13d-1(b) Pacific Ridge Capital Partners, LLC X1 463083.00 0.00 652393.00 0.00 652393.00 4.6 IA AMTECH SYSTEMS INC 58 S RIVER DRIVE SUITE 370, TEMPE, ARIZONA, 85288 Pacific Ridge Capital Partners, LLC 4900 Meadows Rd, STE 320, Lake Oswego, OR 97035 Nevada Corporation N IA 652393 4.57 463083 0 652393 0 Y Y Y Y Y N By signing below I certify that, to the best of my knowledge and belief, the securities referred to above were acquired and are held in the ordinary course of business and were not acquired and are not held for the purpose of or with the effect of changing or influencing the control of the issuer of the securities and were not acquired and are not held in connection with or as a participant in any transaction having that purpose or effect, other than activities solely in connection with a nomination under § 240.14a-11. Pacific Ridge Capital Partners, LLC Peter Trumbo 02/12/2025