Exhibit 23.1
Consent of Independent Registered
Public Accounting Firm
We have issued our reports dated February 26, 2010, with respect to the consolidated financial
statements and internal control over financial reporting included in the Annual Report of Advanced
Energy Industries, Inc. on Form 10-K for the year ended
December 31, 2009, which are incorporated by
reference in this Registration Statement. We consent to the incorporation by reference in the
Registration Statement of the aforementioned reports.
/s/ GRANT THORNTON LLP
Denver, Colorado
June 24, 2010