Exhibit 23.1
Consent of Independent Registered Public Accounting Firm
We have issued our reports dated February 26, 2010, with respect to the consolidated financial
statements and internal control over financial reporting included in the Annual Report of Advanced
Energy Industries, Inc. on Form 10-K for the year ended December 31, 2009, which are incorporated
by reference in this Registration Statement. We consent to the incorporation by reference in the
Registration Statement of the aforementioned reports.
Denver, Colorado
August 4, 2010