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| SUBSIDIARY NAME | JURISDICTION OF ORGANIZATION |
| FormFactor International, Inc. | Delaware, United States |
| FormFactor, K.K. | Japan |
| FormFactor Korea, Inc. | South Korea |
| FormFactor Singapore Pte. Ltd. | Singapore |
| Microprobe HongKong Limited | Hong Kong |
| FormFactor Technology (Suzhou) Co. Ltd. | People's Republic of China |
| FormFactor GmbH | Germany |
| Cascade Microtech Singapore Pte, Ltd | Singapore |
| FormFactor International (Shanghai) Trading Co., Ltd. | People's Republic of China |
| Advanced Temperature Test Systems GmbH | Germany |
| FormFactor SASU | France |
| High Precision Devices, Inc. | Colorado, United States |