Model
Edge
Zygo Corp
0000730716
Filing type
10-Q
Filing date
May 9, 2013
Updated
May 10, 2013 ยท 9:08 AM
Copy reference
Filing
10-Q
Primary document
Exhibits
EX-31.1
EX-31.2
EX-32.1
EX-32.2
EX-101.INS
EXCEL
IDEA: XBRL DOCUMENT