Model
Edge
Zygo Corp
0000730716
Filing type
10-K
Filing date
Sep 12, 2013
Updated
Sep 13, 2013 ยท 10:10 AM
Copy reference
Filing
10-K
Primary document
Exhibits
GRAPHIC
Graphic
EX-21
EX-23.1
EX-31.1
EX-31.2
EX-32.1
EX-32.2
EX-101.INS
EXCEL
IDEA: XBRL DOCUMENT