ModelEdge

Zygo Corp

0000730716

Filing Type	10-Q
Filing Date	11/11/2013
Updated	11/12/13, 4:17 AM

Filing

10-Q

Earnings Release

Exhibits

10-Q

EX-31.1

EX-31.2

EX-32.1

EX-32.2

EX-101.INS

EXCELIDEA: XBRL DOCUMENT