Model
Edge
Zygo Corp
0000730716
Filing type
10-Q
Filing date
Feb 24, 2014
Updated
Feb 25, 2014 ยท 9:43 AM
Copy reference
Filing
10-Q
Primary document
Exhibits
EX-31.1
EX-31.2
EX-32.1
EX-32.2
EX-101.INS
EXCEL
IDEA: XBRL DOCUMENT