Model
Edge
Zygo Corp
0000730716
Filing type
10-Q
Filing date
May 11, 2014
Updated
May 12, 2014 ยท 10:17 AM
Copy reference
Filing
10-Q
Primary document
Exhibits
EX-31.1
EX-31.2
EX-32.1
EX-32.2
EX-101.INS
EXCEL
IDEA: XBRL DOCUMENT