ModelEdge
Axcelis Technologies Inc
ACLS
Filing type
10-K
Filing date
Feb 25, 2026
Updated
Feb 26, 2026 ยท 1:48 PM

Filing

10-KFY 2024

Exhibits

EX-10.1EX-10.1EX-10.7EX-10.7EX-10.8EX-10.8EX-14.1EX-14.1EX-21.1EX-21.1EX-23.1EX-23.1EX-31.1EX-31.1EX-31.2EX-31.2EX-32.1EX-32.1EX-32.2EX-32.2GRAPHICGraphic