ModelEdge

Axcelis Technologies Inc

Filing Type	425
Filing Date	9/30/2025
Updated	10/1/25, 3:27 PM

Filing

Earnings Release

Exhibits

425Prospectus Filed Pursuant to Rule 425

EX-99.1EXHIBIT 99.1

EX-99.2EXHIBIT 99.2

EX-99.3EXHIBIT 99.3

EX-99.4EXHIBIT 99.4

EX-99.5EXHIBIT 99.5

EX-99.6EXHIBIT 99.6