ModelEdge

Axcelis Technologies Inc

Filing Type	S-4
Filing Date	12/7/2025
Updated	12/8/25, 3:08 PM

Filing

Earnings Release

Exhibits

EX-23.1EXHIBIT 23.1

EX-23.2EXHIBIT 23.2

EX-99.1EXHIBIT 99.1

EX-99.2EXHIBIT 99.2

EX-FILING FEESEX-FILING FEES