ModelEdge

Axcelis Technologies Inc
ACLS
Filing TypeS-4/A
Filing Date12/28/2025
Updated12/29/25, 3:19 PM

Filing

S-4/A
Earnings Release

Exhibits

S-4/AS-4/A
EX-5.1EXHIBIT 5.1
EX-8.1EXHIBIT 8.1
EX-23.1EXHIBIT 23.1
EX-23.2EXHIBIT 23.2
EX-99.1EXHIBIT 99.1
EX-99.3EXHIBIT 99.3
EX-99.4EXHIBIT 99.4
EX-99.5EXHIBIT 99.5
EX-99.6EXHIBIT 99.6
EX-99.7EXHIBIT 99.7
EX-99.8EXHIBIT 99.8
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