ModelEdge
Axcelis Technologies Inc
ACLS
Filing type
S-4/A
Filing date
Dec 28, 2025
Updated
Dec 29, 2025 ยท 3:19 PM

Filing

S-4/AS-4/A

Exhibits

EX-5.1EXHIBIT 5.1EX-8.1EXHIBIT 8.1EX-23.1EXHIBIT 23.1EX-23.2EXHIBIT 23.2EX-99.1EXHIBIT 99.1EX-99.3EXHIBIT 99.3EX-99.4EXHIBIT 99.4EX-99.5EXHIBIT 99.5EX-99.6EXHIBIT 99.6EX-99.7EXHIBIT 99.7EX-99.8EXHIBIT 99.8GRAPHICGraphicGRAPHICGraphicGRAPHICGraphicGRAPHICGraphicGRAPHICGraphicGRAPHICGraphicGRAPHICGraphicGRAPHICGraphicGRAPHICGraphicGRAPHICGraphicGRAPHICGraphic